1.

Conference Proceedings
Conference Proceedings
1. LASER ASSISTED CHEMICAL VAPOR DEPOSITION OF Cu FROM A NEW Cu ORGANOMETALLIC COMPLEX
Hans, Jaesung ; Jensen, Klavs F. ; Norman, John A. T.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.97-104,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
2.

Conference Proceedings
Conference Proceedings
2. The Chemical Vapor Deposition of Al-Cu Films Utilizing Independent Aluminum and Copper Organometallic Sources in a Simultaneous Deposition
Healy, Matthew D. ; Norman, John A. T. ; Hochberg, Arthur K.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.289-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427