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You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
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1.
Conference Proceedings
Conference Proceedings
1.
PERFORMANCE OF AN ADVANCED FRONT OF THE LINE CLEAN COMPARED TO THE PROCESS OF RECORD CLEAN IN A MANUFACTURING ENVIRONMENT
Novak, R. ; Kashkoush, I. ; Nolan, J. ; Hunter, J. ; Straight, J.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
. pp.123-128, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-26
2.
Conference Proceedings
Conference Proceedings
2.
Improving the intensity of the HELEN Laser at AWE (Invited Paper)
Hopps, N. ; Nolan, J. ; Girling, M. ; Kopec, M. ; Harvey, E.
Pub. info.:
Laser Resonators and Beam Control VIII
. pp.8-19, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5708
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Author: Nolan, J.
Language
English
(2)
Publication Year
2000-2009
(2)
Type
Conference Proceedings
(2)
Author
Girling, M.
(1)
Harvey, E.
(1)
Hopps, N.
(1)
Hunter, J.
(1)
Kashkoush, I.
(1)
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