1.

Conference Proceedings
Conference Proceedings
1. Performance of cell-shift defect inspection technique
Morikawa,Y. ; Ogawa,T. ; Tsuchiya,K. ; Noguchi,S. ; Nakashima,K.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.404-414,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. Recent progress in repair accuracy of the focused ion-beam mask repair system
Aita,K. ; Yasaka,A. ; Kitamura,T. ; Matsumura,H. ; Satoh,Y. ; Nakamura,H. ; Fujikawa,J. ; Tsuchiya,K. ; Noguchi,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.324-335,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
3.

Conference Proceedings
Conference Proceedings
3. Performance of gas-assisted FIB repair for opaque defects
Satoh,Y. ; Nakamura,H. ; Fujikawa,J. ; Tsuchiya,K. ; Noguchi,S. ; Aita,K. ; Yasaka,A.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.124-137,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884