Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

42 results

Conference Proceedings

1. THE INFLUENCE OF HBr DISCHARGE AMBIENCE ON POLY-Si/ SiO2 ETCHING SELECTIVITY

Ikawa, E. ; Tokashiki, K. ; Kikkawa, T. ; Teraoka, Y. ; Nishiyama, I.

Pub. info.:	Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.255-262, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	223

Conference Proceedings

2. NGL data conversion system

Takeichi, Y. ; Nishiyama, I. ; Yamada, N.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.491-500, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

3. Layout compensation for EUV flare

Nishiyama, I. ; Komori, H. ; Soumagne, G.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.320-329, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

4. Oxidation resistance of Ru-capped EUV multilayers

Sugawara, M. ; Nishiyama, I. ; Takai, M.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.118-127, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

5. The effect of debris on collector optics, its mitigation and repair: next-step a gaseous Sn EUV DPP source

Oizumi, H. ; Yamanashi, H. ; Nishiyama, I. ; Hashimoto, K. ; Ohsono, S. ; Masuda, A. ; Izumi, A. ; Matsumura, H.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.572-577, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

6. Investigation of plasma-induced erosion of multilayer condenser optics

Tanaka, Y. ; Oizumi, H. ; Hashimoto, T. ; Kumasaka, F. ; Nishiyama, I. ; Abe, T. ; Mohri, H. ; Hayashi, N.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.128-139, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

7. Fabrication of aspherical mirrors for EUV projection optics set-3 of HiNA

Oshino, T. ; Takahashi, S. ; Yamamoto, T. ; Miyoshi, T. ; Shiraishi, M. ; Komiya, T. ; Kandaka, N. ; Kondo, H. ; Mashima, K. ; Nomura, K. ; Murakami, K. ; Oizumi, H. ; Nishiyama, I. ; Okazaki, S.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.10-19, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5533

Conference Proceedings

8. Study of Ion Irradiated Poly-Lactic Acid Using Slow Positron Beam

Saito, F. ; Yotoriyama, T. ; Nagashima, Y. ; Suzuki, Y. ; Itoh, Y. ; Goto, A. ; Iwaki, M. ; Nishiyama, I. ; Hyodo, T.

Pub. info.:	Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003. pp.340-342, 2004. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	445-446

Conference Proceedings

9. CONTROL OF NATiVE OXIDES ON DEEP-SUBMICRON CONTACT-HOLE-BOTTOM SURFACES

Aoto, N. ; Nakamori, M. ; Hada, H. ; Kunio, T. ; Teraoka, Y. ; Nishiyama, I. ; Ikawa, E.

Pub. info.:	Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.65-69, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-7

10.

Technical Paper

10. Current Status of NeLS Project: R&D of Global Multimedia Mobile Satellite Communications.

Suzuki, R. ; Nishiyama, I. ; Motoyoshi, S. ; Morikawa, E. ; Yasuda, Y.

Pub. info.:	AIAA paper. 2002. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA International Communications Satellite Systems Conference
Ser. no.:	2002

42 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by:

Author: Nishiyama, I.