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Conference Proceedings

1. Performance of very high repetition rate ArF lasers

Hueber,J.-M. ; Besaucele,H. ; Das,P.P. ; Eis,R. ; Ershov,A.I. ; Fleurov,V.B. ; Gaidarenko,D. ; Hofmann,T. ; Melcher,P.C. ; Partlo,W.N. ; Nikolaus,B.K. ; Smith,S. ; Webb,K.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1418-1423, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

2. Excimer laser:innovation in industrial material processing

Basting,D. ; Endert,H. ; Patzel,R. ; Nikolaus,B.K.

Pub. info.:	Lasers as tools for manufacturing of durable goods and microelectronics : 19 January-2 February, 1996, San Jose, California. PartA pp.126-137, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2703

Conference Proceedings

3. Excimer lasers for material ablation cross the 1.5kHz mark

Patzel,R. ; Stamm,U. ; Bragin,I. ; VoB,F. ; Nikolaus,B.K. ; Endert,H. ; Basting,D.

Pub. info.:	Excimer lasers, optics, and applications : 12-13 February 1997, San Jose, California. pp.2-6, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2992

Conference Proceedings

4. Multiple-watt ultraviolet power from a diode-pumped solid state laser at 1-kHz repetition rate

Stamm,U. ; Zschocke,W. ; Nikolaus,B.K. ; Genter,P. ; Basting,D.

Pub. info.:	Laser Applications in Microelectronic and Optoelectronic Manufacturing II. pp.194-200, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2991

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