1.
Conference Proceedings
Allendorf, M.D. ; Nielsen, I.M.B. ; Melius, C.F. ; van Mol, A.M.B.
Pub. info.:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium . pp.55-64, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
2.
Conference Proceedings
Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.
Pub. info.:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing . pp.393-400, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2