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11 results

Conference Proceedings

1. COLUMNAR EPITAXY OF HEXAGONAL AND ORTHORPHOMBIC SILICIDES ON Si(111)

Fathauer, R. W. ; Nieh, C. W. ; Xiao, Q. F. ; Hashimoto, Shin

Pub. info.:	Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.583-588, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	198

Conference Proceedings

2. FORMATION OF BURIED OXIDE IN MEV OXYGEN IMPLANTED SILICON

Nieh, C. W. ; Xiong, F. ; Ahn, C. C. ; Zhou, Z. ; Jamieson, D. N. ; Vreeland Jr., T. ; Fultz, B. ; Tombrello, T. A.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.73-78, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

3. *APPLICATIONS OF AMORPHOUS Ti-P-N DIFFUSION BARRIERS IN SILICON METALLIZATION

Kolawa, E. ; Halperin, L. ; Pokela, P. ; Vu, Quat T. ; Nieh, C. W.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.33-40, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

4. EFFECTS OF DOPANTS ON THE NUCLEATION AND GROWTH OF NiSi2 ON SILICON

Lu, S. W. ; Nieh, C. W. ; Chu, J. J., ; Chen, L. J..

Pub. info.:	Initial stages of epitaxial growth : symposium held April 22-24, 1987, Anaheim, California, U.S.A.. pp.39-44, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	94

Conference Proceedings

5. INTERFACIAL REACTIONS OF Mo WITH Al: ION MIXING VERSUS THERMAL ANNEALING

Ma. E. ; Brunner, A. J. ; Workman, T. W. ; Nieh, C. W. ; Zhao, X. -A. ; Nicolet, M. -A.

Pub. info.:	Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.75-80, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	100

Conference Proceedings

6. ELECTRON-RADIATION-INDUCED EPITAXIAL GROWTH OF CoSi2 ON Si (111)

Nieh, C. W. ; Lin, T. L. ; Fathauer, R. W.

Pub. info.:	Chemistry and defects in semiconductor heterostructures. pp.89-94, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	148

Conference Proceedings

7. EFFECTS OF DOUBLE-IMPLANT ON THE EPITAXIAL GROWTH OF AMORPHOUS SILICON

Chen, L. J. ; Nieh, C. W.

Pub. info.:	Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.353-358, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	27

Conference Proceedings

8. FORMATION OF EPITAXIAL NiSi2 AND CoSDi2 ON LATERALLY CONFINED (111) Si

Chang, C. S. ; Nieh, C. W. ; Chen, L. J.

Pub. info.:	Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.485-490, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	91

Conference Proceedings

9. MBE GROWTH OF GaAs ON POROUS SILICON

Lin, T. L. ; Sadwick, L. ; Wang., K. L. ; Rhee, S. S. ; Kao, Y. C. ; Hull, R ; Nieh, C. W. ; Jamieson, D. N. ; Liu, J. K. ; Nicolet, M-A.

Pub. info.:	Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.113-118, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	91

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Conference Proceedings

10. EPITAXIAL CoSi2/POROUS-SI STRAINED LAYER STRUCTURES GROWN BY MBE

Kao, Y. C. ; Jamieson, D. ; Bai, G., ; Nieh, C. W. ; Lin, T. L. ; Wu, B. J. ; Chen, H. Y. ; Wang, K. L.

Pub. info.:	Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.473-478, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	91

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Author: Nieh, C. W.