Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.190-197, 1999. Pennington, N.J.. Electrochemical Society
Nguyen, D.B. ; Mcgahay, V. ; Endicott, G. ; Aggarwala, B. ; Rathore, H.S. ; Yankke, S.
Pub. info.:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.112-125, 1997. Pennington, NJ. Electrochemical Society