1.

Conference Proceedings
Conference Proceedings
1. Structure-Property Relationships for Nano-porous Poly (Methyl-Silsesquioxane) Films with Low Dielectric Constants Prepared via Organ icflnorganic Polymer Hybrids
Nguyen, C.V. ; Hawker, C.J. ; Hedrick, J.L. ; Jaffe, R.L. ; Miller, R.D. ; Remenar, J.F. ; Rhee, H.W. ; Toney, M.F. ; Trollsas, M. ; Volksen, W. ; Yoon, D.Y.
Pub. info.: Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium.  pp.38-45,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-7
2.

Conference Proceedings
Conference Proceedings
2. Carbon nanotube scanning probe for surface profiling of DUV and 193-nm photoresist pattern
Nguyen, C.V. ; Stevens, R.M.D. ; Barber, J. ; Han, J. ; Meyyappan, M. ; Sanchez, M.I. ; Larson, C.E. ; Hinsberg, W.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.58-62,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689