1.

Conference Proceedings
Conference Proceedings
1. Bonded Silicon Silicide on Insulator (S2OI) a Study of Chemical, Physical and Optical Properties for Advanced Device Fabrication
Nayar, V. ; Carline, R.T. ; Newey, J. ; Pidduck, A.J. ; Reeves, C. ; Russell, J. ; Williams, G. ; Quinn, C. ; Nevin, A. ; Blackstone, S. ; Feindt, S.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.544-551,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
2.

Conference Proceedings
Conference Proceedings
2. Fusion-Bonded Multilayered SOI for MEMS Applications
Somasundram, K. ; McCann, P. ; Cole, D. ; McNamara, C. ; Boyle, A. ; Devine, C. ; Brown, A. ; Nevin, A.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.288-300,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-19
3.

Conference Proceedings
Conference Proceedings
3. An Investigation into Interfacial Oxide in Direct Silicon Bonding
McCann, P. ; Byrne, S. ; Nevin, A.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.106-113,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-27
4.

Conference Proceedings
Conference Proceedings
4. Fusion-bonded multilayer SOI for MEMS applications
Somasundram, K. ; Cole, D. ; McNamara, C. ; Boyle, A. ; McCann, P. ; Devine, C. ; Nevin, A.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.12-19,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
5.

Conference Proceedings
Conference Proceedings
5. Fusion-bonded mutilayered SOI for MEMS applications
Cole, D. ; McNamara, C. ; Somasundram, K. ; Boyle, A. ; Devine, C. ; MoKeever, J. ; McCann, P. ; Nevin, A.
Pub. info.: Opto-Ireland 2002: Optics and Photonics Technologies and Applications.  Part Two  pp.623-632,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4876