1.

Conference Proceedings

Conference Proceedings
Moll, J. ; Allan, D.C. ; Neukirch, U.
Pub. info.: Optical Microlithography XVII.  pp.1721-1726,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings

Conference Proceedings
Neukirch, U. ; Li, X.
Pub. info.: Optical Microlithography XVII.  pp.1715-1720,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377