1.

Conference Proceedings
Conference Proceedings
1. REDISTRIBUTION OF BORON IMPLANTED INTO TaSi2/POLY-Si GATES
Schwalke, U. ; Mazure, C. ; Neppl, F.
Pub. info.: Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A..  pp.187-192,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 106
2.

Conference Proceedings
Conference Proceedings
2. Diffusion of As, B, and P in TaSi2
Eichinger, P. ; Frenzel, E. ; Neppl, F.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.165-172,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25
3.

Conference Proceedings
Conference Proceedings
3. DOPANT DIFFUSION FROM TON-IMPLANTED TaSI2
Gierisch, H. ; Neppl, F. ; Frenzel, E. ; Eichinger, P. ; Hieber, K.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.183-190,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
4.

Conference Proceedings
Conference Proceedings
4. Barrier properties of TaSi2 in contact with Al-metallization
Neppl, F. ; Schwabe, U.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.587-592,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25
5.

Conference Proceedings
Conference Proceedings
5. Interface reactions of TaSi2/Si contacts at high temperature
Oppolzer, H. ; Neppl, F. ; Hieber, K.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.593-600,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25