1.

Conference Proceedings
Conference Proceedings
1. In-Line Ambient Impurity Measurement on a Rapid Thermal Process Chamber by Atmospheric Pressure Ionization Mass Spectrometry
Kondoh, Eiichi ; Vereecke, Guy ; Heyns, Marc M. ; Maex, Karen ; Gutt, Thomas ; Nenyei, Zsolt
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.51-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. Thermally Grown and Reoxidized Nitrides as Alternative Gate Dielectrics
Ludsteck, Alexandra ; Dietl, Waltraud ; Chung, Hinyiu ; Schulze, Joerg ; Nenyei, Zsolt ; Eisele, Ignaz
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.245-250,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786