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Conference Proceedings

1. Metrology methods for the quantification of edge roughness

Nelson,C.M. ; Palmateer,S.C. ; Lyszczarz,T.M.

Pub. info.:	Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California. pp.19-29, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3332

Conference Proceedings

2. High-speed monitoring and control of CVD metal-organic precursors using FT-IR spectroscopy

Marran,D.F. ; Nelson,C.M. ; Guido,L.J. ; Caffey,B.

Pub. info.:	Advanced sensors and monitors for process industries and the environment : 4-5 November 1998, Boston, Massachusetts. pp.24-31, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3535

Conference Proceedings

3. Line-edge roughness in sub-0.18-ｦﾌm resist patterns

Palmateer,S.C. ; Cann,S.G. ; Curtin,J.E. ; Doran,S.P. ; Eriksen,L.M. ; Forte,A.R. ; Kunz,R.R. ; Lyszczarz,T.M. ; Stern,M.B. ; Nelson,C.M.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.634-642, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

4. Fragmentation mechanisms of oligonucleotides in MALDI mass spectrometry

Nelson,C.M. ; Zhu,L. ; Tang,W. ; Smith,L.M. ; Crellin,K. ; Berry,J. ; Beauchamp,J.L.

Pub. info.:	Proceedings of ultrasensitive biochemical diagnostics : 31 January, 2 February 1996, San Jose, California. pp.247-255, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2680