1.

Conference Proceedings
Conference Proceedings
1. Use of nanomachining for 100-nanometer mask repair
LoBianco, B.T. ; White, R. ; Nawrocki, T.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.249-262,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
2.

Conference Proceedings
Conference Proceedings
2. Use of nanomachining for 100-nm mask repair
LoBianco, B. ; White, R. ; Nawrocki, T.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.909-921,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889