1.

Conference Proceedings
Conference Proceedings
1. Risk-Based Evaluation of Bulk Anhydrous Hydrogen Chloride Delivery Alternatives Used in the Semiconductor Industry
Nauert, C. ; Brown, P.T.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.160-173,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. EHS Infrastructure Issues in Modern Wafer Fabs
Brown, P.T. ; Reblin, R. ; Heironimus, J. ; Nauert, C. ; Mendicino, L.
Pub. info.: Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium.  pp.183-198,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-6
3.

Conference Proceedings
Conference Proceedings
3. A Summary of Recent Motorola Water Conservation Efforts from Source Reduction of Process Equipment
Raley, B. ; Nauert, C. ; Dietrich, T.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.190-199,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
4.

Conference Proceedings
Conference Proceedings
4. PFC Emissions Reduction and Process Improvements with Remote Plasma CVD Chamber Cleans
Mendicino, L. ; Brown, P.T. ; Filipiak, S. ; Nauert, C. ; Estep, H. ; Fletcher, M.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.144-156,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
5.

Conference Proceedings
Conference Proceedings
5. Environmental Health and Safety (EHS) Investigation of CVD Exhaust System: Identification and Mitigation of Potential Release of Process Gases and By-products
Chandna, L. ; Reynoso, A. ; Nauert, C. ; Hendncksen, K.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.237-247,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
6.

Conference Proceedings
Conference Proceedings
6. Emergency Preparedness and Response for Semiconductor Manufacturing
Harris, S. ; Nauert, C.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.226-236,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
7.

Conference Proceedings
Conference Proceedings
7. Evaluation of Ozone Emissions Destruction Units for SACVD Process Tools
Nauert, C. ; Camacho, R. ; Day, B. ; Lathrop, R. ; Kwong, H. ; Fox, J.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.63-76,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
8.

Conference Proceedings
Conference Proceedings
8. Reduced Clean Time and PFC Emissions Reduction Through Remote Plasma Clean For Lamp Heated CVD Chambers
Mendicino, L. ; Nauert, C. ; Brown, P.T. ; Golovato, S. ; Day, B. ; Atherton, A. ; Nowak, T. ; Silvetti, D. ; Hartz, C. ; Johnson, A. ; Maroulis, P.
Pub. info.: Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium.  pp.15-27,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-6
9.

Conference Proceedings
Conference Proceedings
9. Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction
Mendicino, L. ; Nauert, C. ; Flood, J. ; Brown, P.T. ; Atherton, A. ; Nowak, T. ; Silvetti, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.42-51,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7