1.

Conference Proceedings
Conference Proceedings
1. ON THE GENERATION OF CRYOGENIC AEROSOLS FOR WAFER PROCESSING
Narayanswami, N.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.357-364,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. THERMOPHORESIS ASSISTED CRYOGENIC AEROSOL CLEANING OF WAFERS
Narayanswami, N.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.350-356,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
3.

Conference Proceedings
Conference Proceedings
3. METHOD FOR EVALUATION AND OPTIMIZATION OF PARTICLE REMOVAL PROCESSES
Narayanswami, N. ; Ruether, P.A. ; Thomes, G. ; Weygand, J.F. ; Lee, N.-P. ; Christenson, K.K. ; Butterbaugh, J.W. ; Hoo, S.H. ; Liu, B.Y.H.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.469-476,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36