1.

Conference Proceedings
Conference Proceedings
1. Improved Al-Via Fill Process Technology for Sub-0.25 ｦﾌm Interconnect
Sengupta, S. S. ; Narasimhan, M. ; Lee, S. ; Abburi, M. ; Yao, G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.437-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. ARC Suppression and Defect Reduction in Semiconductor Metallization
Li, X. ; Loo, D. ; Stimson, B. ; Seamons, S. ; Narasimhan, M.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.259-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
3.

Conference Proceedings
Conference Proceedings
3. Design Considerations for a Hydrogen Recovery Scheme from Recovery Off-Gases
Pacalowska, B. ; Whysall, M. ; Narasimhan, M.
Pub. info.: AIChE NATIONAL MEETING - MARCH 9-13, 1997 - HOUSTON, TX.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997