1.

Conference Proceedings
Conference Proceedings
1. LAYERED POLY/AMORPHOUS SILICON DEPOSITION PROCESS FOR IMPROVED SILICIDE INTEGRITY
Roy, P.K. ; Nanda, A.K. ; Taylor, J.A.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.647-652,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings
Conference Proceedings
2. COMPOUND SIDEWALL SPACER TECHNOLOGY FOR SUBMICRON MOSFET
Roy, P.K. ; Kook, T. ; Kizilyalli, I.C. ; Nanda, A.K.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.449-456,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
3.

Conference Proceedings
Conference Proceedings
3. Effect of CMP Polish Conditions on the Step Height Reduction and on Local Removal Rate for 0.25μm CMOS Process
Wei, Chai Kok ; Man, Law Kai ; Nanda, A.K.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.348-353,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Commercial Tungsten CMP Slurries for IC Device Manufacturing
Wei, Chai Kok ; Nanda, A.K. ; Leong, Neo Teck
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.342-347,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
5.

Conference Proceedings
Conference Proceedings
5. Characterization of Undoped and In Situ Phosphorous- Doped Amorphous Silicon Films for Integrated Circuit Manufacturing
Nanda, A.K. ; Felton, G.J.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.163-170,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
6.

Conference Proceedings
Conference Proceedings
6. Detection and Sources of Volatile Clean Room Contaminants
Muller, A.J. ; Psota-Kelty, L.A. ; Krautter, H.W. ; Sinclair, J.D. ; Stevie, F.A. ; Martin, E.P. ; Kahora, P.M. ; Nanda, A.K.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.143-156,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3