1.
Conference Proceedings
Nam,B.H. ; Park,J.O. ; Lee,D.J. ; Cheong,J.H. ; Hwang,Y.J. ; Song,Y.J.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology VII . pp.716-724, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4066
2.
Conference Proceedings
Nam,B.H. ; Kim,D.S. ; Cho,B.H. ; Seok,N.K. ; Jeong,J.K. ; Kim,S.P. ; Kang,S.W. ; Hwang,Y.J. ; Song,Y.J.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.793-800, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
3.
Conference Proceedings
Nam,B.H. ; Cho,B.H. ; Park,J.O. ; Kim,D.-S. ; Baek,S.J. ; Jeong,J.H. ; Nam,B.-S. ; Hwang,Y.J. ; Song,Y.J.
Pub. info.:
Optical Microlithography XIV . 4346 pp.1290-1299, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346