1.
Conference Proceedings |
1. Buried Oxide Precipitates in a Si Wafer Due to He Ion Imptantation and High-Temperature Oxidation
Nakashima, Sadao ; Nakata, Jyoji ; Hayashi, Junzou ; Imai, Kazuo
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2.
Conference Proceedings |
Taguchi, Akihito ; Takahei, Kenichiro ; Nakata, Jyoji
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