1.

Conference Proceedings
Conference Proceedings
1. High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge
Enami,T. ; Wakabayashi,O. ; Nishisaka,T. ; Suzuki,N. ; Nire,T. ; Mizoguchi,H. ; Nakarai,H. ; Tanaka,H. ; Ariga,T. ; Shio,K. ; Okamoto,T. ; Noudomi,R. ; Tomaru,H. ; Nakao,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.1031-1040,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. High-NA high-throughput scanner compatible 2-kHz KrF excimer laser for DUV lithography
Nakarai,H. ; Hisanaga,N. ; Suzuki,N. ; Matsunaga,T. ; Asayama,T. ; Akita,I. ; Igarashi,T. ; Ariga,T. ; Bushida,S. ; Enami,T. ; Nodomi,R. ; Takabayashi,Y. ; Sakanishi,S. ; Suzuki,T. ; Nakao,K.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1481-1490,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
3.

Conference Proceedings
Conference Proceedings
3. Ultra-line-narrowed F2 laser for microlithography
Komori,H. ; Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.424-428,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
4.

Conference Proceedings
Conference Proceedings
4. Present status of development of gas-purging and chemically clean technologies at ASET
Fukuda,Y. ; Takeuchi,S. ; Aoki,T. ; Owa,S. ; Yoshida,F. ; Kawasa,Y. ; Sumitani,A. ; Egawa,K. ; Watanabe,T. ; Nakao,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.659-668,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
5.

Conference Proceedings
Conference Proceedings
5. Spectral measurement of ultra line-narrowed F2 laser
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
6.

Conference Proceedings
Conference Proceedings
6. Challenge of the F2 laser for dioptric projection system
Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.1158-1165,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346