1.

Conference Proceedings
Conference Proceedings
1. High-resolution multigrating spectrometer for high-quality deep-UV light source production
Suzuki,T. ; Nakaike,T. ; Wakabayashi,O. ; Mizoguchi,H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1452-1460,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Spectral measurement of ultra line-narrowed F2 laser
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346