Fezuka, F. ; Suglyama, N. ; Mizuno, F ; Nakaharai, S. ; Fakagi, S.
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Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.305-314, 2003. Pennington, NJ. Electrochemical Society
Moriyama, Y. ; Sugiyama, N. ; Hirashita, N. ; Nakaharai, S. ; Takagi, S. (MIRAI-ASET)
Pub. info.:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.849-856, 2004. Pennington, N.J.. Electrochemical Society
Takagi, S. ; Mizuno, T. ; Tezuka, T ; Sugiyama, N. ; Numata, T. ; Usuda, K. ; Moriyama, Y. ; Nakaharai, S. ; Koga, J. ; Tanabe, A. ; Hirashita, N. ; Irisawa, T. ; Maeda, T.(MIRAI-AIST)
Pub. info.:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.61-76, 2004. Pennington, N.J.. Electrochemical Society
Nakaharai, S. ; Tezuka, T. ; Sugiyama, N. ; Takagi, S. (MIRAI ASET)
Pub. info.:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.741-748, 2004. Pennington, N.J.. Electrochemical Society
Takagi, S-I. ; Mizuno, T. ; Tezuka, T. ; Sugiyama, N ; Numata, T. ; Usuda, K. ; Monyama, Y. ; Nakaharai, S. ; Koga, J. ; Tanabe, A. ; Maeda, T.
Pub. info.:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.159-174, 2003. Pennington, N.J.. Electrochemical Society