1.

Conference Proceedings
Conference Proceedings
1. PLASMA HYDROGENATION STUDIES ON LOW-TEMPERATURE MBE-GROWN GaAs
Nakagawa, O. S. ; Ashok, S. ; Zhang, K. ; Miller, D. L. ; Chung, W. K.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.437-442,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
2.

Conference Proceedings
Conference Proceedings
2. Interaction and balance of mask write time and design RET strategies [5853-44]
Zhang, Y. ; Gray, R. ; Nakagawa, O. S. ; Gupta, P. ; Kamberian, H. ; Xiao, G. ; Cottle, R. ; Progler, C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.614-618,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853