Nakabayasbi, Y. ; Osman, H.I. ; Toyonaga, K. ; Yokota, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.241-247, 2002. Pennington, NJ. Electrochemical Society
Nakabayasbi, Y. ; Osman, H.I. ; Toyonaga, K. ; Yokota, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.241-247, 2002. Pennington, NJ. Electrochemical Society