1.

Conference Proceedings
Conference Proceedings
1. Photomask quality assessment strategy at 90-nm technology node with aerial image simulation
Nagamura, Y. ; Hosono, K. ; Pang, L. ; Chan, K.K. ; Tanaka, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.476-483,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
2.

Conference Proceedings
Conference Proceedings
2. New repair of clear defects on half-tone PSM using Ga implantation
Nagamura, Y. ; Kanai, I. ; Tange, K. ; Hosono, K. ; Hayashi, K. ; Ikeda, H. ; Nagashige, S. ; Ishijima, M. ; Iwasaki, H. ; Kikuchi, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.466-475,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Defect printability and inspection capability for tri-tone PSM
Nagamura, Y. ; Maetoko, K. ; Maeshima, K. ; Tamada, N. ; Hosono, K. ; Fujimoto, M. ; Kodera, Y. ; Goto, K. ; Narita, T. ; Matsuo, F. ; Akima, S. ; Ishijima, M. ; Iwasaki, H. ; Kikuchi, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.454-465,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings
Conference Proceedings
4. Defect quality management of 248nm alt- PSM in low-k1 condition [5853-87]
Nagamura, Y. ; Momose, S. ; Imai, A. ; Hosono, K. ; Morikawa, Y. ; Kojima, K. ; Mohri, H. ; Dai Nippon Printing Co., Ltd. (Japan)
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.977-987,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853