1.

Conference Proceedings
Conference Proceedings
1. Mask blank particle inspection in vacuum environments
Sekine, A. ; Nagahama, H. ; Tojo, T. ; Akeno, K. ; Hirano, R.
Pub. info.: Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany.  pp.624-631,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4902
2.

Conference Proceedings
Conference Proceedings
2. Seed-Layer Deposition For Sub 0.25 Micron Cu Metallization Using A Line Cusp Magnetron Plasma Source
Wickramanayaka, S. ; Nagahama, H. ; Watanabe, E. ; Hayashi, T. ; Sato, M. ; Nakagawa, Y. ; Hasegawa, S. ; Mizuno, S. ; Numasawa, Y.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D6.3-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
3.

Conference Proceedings
Conference Proceedings
3. Surface Structure of Hydrogen Annealed Silicon Wafer Using Ozonized Water and Dilute HF Cleaning
Kurita, H. ; Izunome, K. ; Nagahama, H. ; Ino, T. ; Yamabe, J. ; Hayamizu, N. ; Sakurai, N.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.155-170,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
4.

Conference Proceedings
Conference Proceedings
4. Fractal Properties of Dynamic Recrystallized Grain Boundaries
Takahashi, M. ; Nagahama, H.
Pub. info.: THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain.  pp.3563-3568,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 426-432
5.

Conference Proceedings
Conference Proceedings
5. Characteristics of an autofocus system on a grating with period smaller than the focus-beam wavelength
Ogawa, R. ; Sugihara, S. ; Honguh, Y. ; Nagahama, H. ; Watanabe, T. ; Tsuchiya, H.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.965-972,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256