1.

Conference Proceedings
Conference Proceedings
1. On the quality of measured optical aberration coefficients using phase wheel monitor
L. V. Zavyalova ; A. R. Robinson ; A. Bourov ; N. V. Lafferty ; B. W. Smith
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Mask enhancement using an evanescent wave effect
N. V. Lafferty ; J. Zhou ; B. W. Smith
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. Immersion lithography with numerical apertures above 2.0 using high index optical materials
J. Zhou ; N. V. Lafferty ; B. W. Smith ; J. H. Burnett
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520