H. Tanaka ; S. Han ; Q. Xu ; N. Kuriyama ; K. Aihara ; N. Taoka
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PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea. 561-565 pp.1613-1616, 2007. Uetikon-Zuerich. Trans Tech Publications
N. Taoka ; K. Ikeda ; T. Yamamoto ; Y. Yamashita ; M. Harada
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Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.275-285, 2008. Pennington, N.J.. Electrochemical Society