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Conference Proceedings

1. Degradation of Perfluorinated Membranes Having Intentionally Formed Pt-Band

N. Hasegawa ; T. Asano ; T. Hatanaka ; M. Kawasumi ; Y. Morimoto

Pub. info.:	Proton exchange membrane fuel cells 8. pp.1713-1716, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	16(2)

Conference Proceedings

2. Electrode and Membrane Durability Issues of PEFCs

T. Hatanaka ; T. Takeshita ; H. Murata ; N. Hasegawa ; T. Asano

Pub. info.:	Proton exchange membrane fuel cells 8. pp.1961-1965, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	16(2)

Conference Proceedings

3. Thermoelectric Properties and Densification Behavior of SrTiO₃/TiB₂ Composites

M. Ito ; N. Hasegawa

Pub. info.:	THERMEC 2011 : International Conference on Processing & Manufacturing of Advanced Materials : processing, fabrication, properties, applications, August 1-5, 2011, Quebec City, Canada. pp.1909-1914, 2012. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	706-709

Conference Proceedings

4. Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film

J. Shimizu ; G. Kobayashi ; N. Hasegawa ; T. Yamamoto ; H. Ojima

Pub. info.:	THERMEC 2011 : International Conference on Processing & Manufacturing of Advanced Materials : processing, fabrication, properties, applications, August 1-5, 2011, Quebec City, Canada. pp.2646-2651, 2012. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	706-709

Conference Proceedings

5. Phase-shifting masks for giga-scale ULSIs

A. Imai ; T. Terasawa ; N. Hasegawa ; N. Asai ; T.P. Tanaka

Pub. info.:	Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan. pp.292-302, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2512

Conference Proceedings

6. Advanced process control for hyper-NA lithography based on CD-SEM measurement

T. Ishimoto ; K. Sekiguchi ; N. Hasegawa ; T. Maeda ; K. Watanabe ; G. Storms ; D. Laidler ; S. Cheng

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

7. Advanced CD-SEM metrology to improve total process control performance for hyper-NA lithography

M. Osaki ; M. Tanaka ; C. Shishido ; T. lshimoto ; N. Hasegawa

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 1 pp.69221B-1-69221B-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

Conference Proceedings

8. Further study on the verification of CD-SEM based monitoring for hyper NA lithography

T. lshimoto ; M. Osaki ; K. Sekiguchi ; N. Hasegawa ; K. Watanabe

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69222O-1-69222O-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

Conference Proceedings

9. MuGFET observation and CD measurement by using CD-SEM

T. Maeda ; M. Tanaka ; M. lsawa ; K. Watanabe ; N. Hasegawa

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69222P-1-69222P-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

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Conference Proceedings

10. Recent progress on x-ray laser source development and application activities at JAEA

M. Kishimoto ; K. Nagashima ; T. Kawachi ; N. Hasegawa ; M. Tanaka

Pub. info.:	Soft X-ray lasers and applications VII : 29-30 August, 2007, San Diego, California, USA. pp.67020P-1-67020P-11, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6702

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Author: N. Hasegawa