1.

Conference Proceedings
Conference Proceedings
1. Modeling and performance metrics for longitudinal chromatic aberrations, focus-drilling, and Z-noise: exploring excimer laser pulse-spectra
M. Smith ; J. Bendik ; I. Lalovic ; N. Farrar ; W. Howard ; C. Sallee
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. 45nm node logic device OPE matching between exposure tools through laser bandwidth tuning
K. Yoshimochi ; T. Tamura ; S. Nagahara ; T. Uchiyama ; N. Farrar
Pub. info.: Optical Microlithography XXI.  2  pp.69242K-1-69242K-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924