S. Guha ; V. Narayanan ; V. Paruchuri ; B. Linder ; M. Copel ; N. Bojarczuk ; Y. Kim ; M. Chudzik ; Y. Wang ; P. Ronsheim
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment. pp.247-252, 2006. Pennington, NJ. Electrochemical Society
B. Linder ; V. Paruchuri ; V. Narayanan ; E. Cartier ; N. Bojarczuk ; S. Guha ; S. Brown ; Y. Wang
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.287-294, 2007. Pennington, NJ. Electrochemical Society