1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF SILICON OXIDE ETCHING IN GAS PHASE HF/VAPOR MIXTURES
Muscat, Anthony J. ; Lawing, Scott A. ; Sawin, Herbert H. ; Butterbaugh, Jeff ; Syverson, Dan ; Hiatt, Fred
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.371-378,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
2.

Conference Proceedings
Conference Proceedings
2. Repair of Porous Methylsilsesquioxane Films Using Supercritical Carbon Dioxide
Xie, Bo ; Muscat, Anthony J.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.13-18,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
3.

Conference Proceedings
Conference Proceedings
3. UV/CL2 ETCHING AND CLEANING OF WAFER SURFACES
Lawing, A. Scott ; Muscat, Anthony J. ; Sawin, Herbert H. ; Butterbaugh, Jeffrey W.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.150-157,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20