1.

Conference Proceedings
Conference Proceedings
1. Using Electron Cyclotron Resonance Plasma for Depositing Epitaxial Titanium Nitride Thin Films
Murzin, I. H. ; Hayashi, N. ; Sakamoto, I.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.527-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
2.

Conference Proceedings
Conference Proceedings
2. Carbon Nitride Formation by Plasma Assisted Ion Beam Deposition
Tompa, G. S. ; Murzin, I. H. ; Kim, S. I. ; Ahn, Y. O. ; Gallois, B. ; Fischer, T. E. ; Forsythe, E. W.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.545-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
3.

Conference Proceedings
Conference Proceedings
3. Advanced Interactive Personal Computer-Based Process Control Systems for Oxide MOCVD Systems
Tompa, G. S. ; Shen, D. ; Zhang, C. ; Murzin, I. H. ; Gallois, B. ; Liang, S. ; Gorla, C. R. ; Chen, Y.
Pub. info.: Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A..  pp.167-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 415
4.

Conference Proceedings
Conference Proceedings
4. Cesium-Enhanced rf Magnetron Deposition of Carbon Nitride and Diamondlike Carbon Films
Murzin, I. H. ; Hussain, M. A. ; Tompa, G. S.
Pub. info.: Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A..  pp.153-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 498
5.

Conference Proceedings
Conference Proceedings
5. Carbon Nitride Films Formed Using Sputtering and Negative Carbon Ion Sources
Murzin, I. H. ; Tompa, G. S. ; Wei, J. ; Muratov, V. ; Fischer, T. E. ; Yakovlev, V.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.569-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
6.

Conference Proceedings
Conference Proceedings
6. Study of IBAD-Deposited AlN Films for Vacuum Diode Electron Emission
Forsythe, E. W. ; Sprague, J. A. ; Khan, B. A. ; Metha, S. ; Smith, D. A. ; Murzin, I. H. ; Ahern, B. ; Weyburne, D. W. ; Tompa, G. S.
Pub. info.: III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.1233-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 449