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35 results

Conference Proceedings

1. INTERACTIONS AND STABILITY OF Cu ON CoSI2

Shy, Y. -Y. ; Murarka, S. P. ; Sitaram, A. R. ; Ding, P. -J. ; Lanford, W.A

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.151-156, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. COBALT SILICIDE FORMATION ON POLYSILICON: DOPANT EFFECTS ON REACTION KINETICS AND SILICIDE PROPERTIES

Sitaram, A. R. ; Murarka, S. P.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.185-192, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

3. STABILITY OF SPUTTER DEPOSITED A1-Cu BILAYERS ON SiO2

Nandan, R. ; Murarka, S. P. ; Pant, A. ; Shepard, C. ; Lanford, W. A.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.929-934, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

4. ION IMPLANTATION TO INHIBIT CORROSION OF COPPER

Ding, P. J. ; Lanford, W. A. ; Hymes, S. ; Murarka, S. P.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.757-762, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

5. INTERMETALLIC REACTIONS BETWEEN COPPER AND MAGNESIUM AS AN ADHESION/BARRIER LAYER

Arcot, Binny ; Cabral Jr., C. ; Harper, J. M. E. ; Murarka, S. P.

Pub. info.:	Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.231-236, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	225

Conference Proceedings

6. IN SITU STUDY OF STRESSES GENERATED DURING THE FORMATION OF COBALT DISILICIDE AND THE EFFECT OF POST SILICIDE PROCESSING

Sitaram, A. R. ; Kalb Jr., J. C. ; Murarka, S. P.

Pub. info.:	Thin films : stresses and mechanical properties II : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.67-72, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	188

Conference Proceedings

7. FORMATION OF COBALT SILICIDES IN ARSENIC IMPLANTED COBALT ON SILICON SYSTEM

Sitaram, A. R. ; Murarka, S. P.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.97-104, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

8. COBALT SILICIDE FORMATION ON POLYSILICON: DOPANT EFFECTS ON REACTION KINETICS AND SILICIDE PROPERTIES

Sitaram, A. R. ; Murarka, S. P.

Pub. info.:	Polysilicon thin films and interfaces. pp.83-88, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	182

Conference Proceedings

9. INSTABILITIES IN THE MECHANICAL STRESS IN DEPOSITED SiO2 FILMS CAUSED BY THERMAL TREATMENTS

Bhushan, Bharat ; Murarka, S. P.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.463-468, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

10.

Conference Proceedings

10. ION IMPLANTATION TO INHIBIT CORROSION OF COPPER

Ding, P. J. ; Lanford, W. A. ; Hymes, S. ; Murarka, S. P.

Pub. info.:	Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.199-204, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	265

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