1.

Conference Proceedings

Conference Proceedings
Muramoto,J. ; Inmaru,T. ; Nakata,Y. ; Okada,T. ; Maeda,M.
Pub. info.: First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan.  pp.303-306,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4088
2.

Conference Proceedings

Conference Proceedings
Okada,T. ; Nakata,Y. ; Muramoto,J. ; Maeda,M.
Pub. info.: Laser Applications in Microelectronic and Optoelectronic Manufacturing III.  pp.246-254,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3274