1.

Conference Proceedings
Conference Proceedings
1. CHARGING EFFECTS ON ION TRAJECTORIES IN PLASMA ETCHING
Murakawa, S. ; Fang, S. ; McVittie, J.P.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.483-490,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
2.

Conference Proceedings
Conference Proceedings
2. A New Probe for Direct Measurement of Surface Charging
McVittie, J.P. ; Murakawa, S.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.181-191,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20