1.

Conference Proceedings
Conference Proceedings
1. Product and tool control using integrated auto-macro defect inspection in the photolithography cluster [6152-65]
Menon, V. C. ; Isaacson, R. L. ; Nicholls, M. C. ; Lickteig, S. J. ; Forstner, T. ; Barnett, A. R. ; Mulhall, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521R-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Behavior and control of resist dissolution in the development process
Takai, Y. ; Mulhall, J. ; Yoshihara, K. ; Kyoda, H. ; Takeguchi, H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.929-935,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690