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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.431-437, 1997. Pennington, NJ. Electrochemical Society
Falster, R. ; Voronkov, V.V. ; Holzer, J.C. ; Markgrafh, S. ; McQuaid, S.A. ; Mule'Stagno, L.
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.468-489, 1998. Pennington, NJ. Electrochemical Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.297-306, 2002. Pennington, NJ. Electrochemical Society