Theodoropoulos, C. ; Moffat, H. K. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.155-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Gupta, V. ; Theodoropoulos, C. ; Peck, J. D. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.161-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ingle, N. K. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Wexler, R. M. ; Smith, F. T. J.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.177-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Pawlowski, R. P. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Moffat, H. K. ; Han, J. ; Thrush, E. J.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.159-, 2000. Warrendale, PA. MRS-Materials Research Society
Sarigiannis, D. ; Peck, J. D. ; Mountziaris, T. J. ; Kioseoglou, G. ; Petrou, A.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.41-, 2000. Warrendale, PA. MRS-Materials Research Society
Gorsuch, G. ; Jin, Y. ; Ingle, N. K. ; Mountziaris, T. J. ; Yu, W.-Y. ; Petrou, A.
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.151-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society