1.

Conference Proceedings

Conference Proceedings
Togawa, T. ; Ueda, A. ; Morishige, Y. ; Suzuki, Y.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.346-351,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings

Conference Proceedings
Okamoto, T. ; Morishige, Y. ; Ohmura, E. ; Sano, T. ; Miyamoto, I.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.510-514,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
3.

Conference Proceedings

Conference Proceedings
Uesugi, F. ; Morishige, Y. ; Shinzawa, T. ; Kishida, S. ; Hirata, M. ; Yamada, H. ; Matsumoto, K.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.61-66,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101