1.

Conference Proceedings
Conference Proceedings
1. MECHANISM OF METAL HYDROXIDE ADSORPTION ONTO Si SURFACES IN ALKALI SOLUTIONS AND ITS PREVENTION
Morinaga, H. ; Hoshino, T. ; Omura, Y. ; Kitagawa, M. ; Aoki, M.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.585-592,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. ADDITIVE TECHNOLOGIES FOR SUB 100 nm DEVICE CLEANING
Morinaga, H. ; Itou, A. ; Mochizuki, H. ; Ikemoto, M.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.371-378,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
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Conference Proceedings
Conference Proceedings
3. BEHAVIOR OF ULTRA FINE METALLIC PARTICLES (-10 inm) ON SILICON WAFER SURFACE
Morinaga, H. ; Futatsuki, T. ; Ohmi, T. ; Fuchita, E. ; Oda, M. ; Hayashi, C.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.458-465,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
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Conference Proceedings
Conference Proceedings
4. A STUDY OF METALLIC CONTAMINANTION REMOVAL AND ADDITION USING MODIFIED SC-I SOLUTIONS
Beaudry, C. ; Morinaga, H. ; Verhaverbeke, S.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.118-125,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
5.

Conference Proceedings
Conference Proceedings
5. Mask defect specifications with fail-bit-map analysis
Yamaguchi, S. ; Yamanaka, E. ; Morinaga, H. ; Hashimoto, K. ; Sakamoto, T. ; Hamaguchi, A. ; Matsumoto, S. ; Ikenaga, O. ; Inoue, S.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.826-835,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889