1.

Conference Proceedings

Conference Proceedings
Tanaka,T. ; Choi,S.-J. ; Jung,D.-W. ; Lee,S. ; Lee,S.-H. ; Kang,Y. ; Woo,S.-G. ; Moon,J.-T. ; Kavanagh,R.J. ; Barclay,G.G. ; Orsula,G.W. ; Mattia,J. ; Caporale,S. ; Adams,T.G. ; Tanaka,T. ; Kang,D.
Pub. info.: Advances in resist technology and processing XVIII.  4345  pp.119-130,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
2.

Conference Proceedings

Conference Proceedings
Kim,H.-J. ; Hong,J.-S. ; Kye,J.-W. ; Cha,D.-H. ; Kang,H.-Y. ; Moon,J.-T.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.430-440,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
3.

Conference Proceedings

Conference Proceedings
Seong,N.-G. ; Kye,J.-W. ; Kang,H.-Y. ; Moon,J.-T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.868-872,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
4.

Conference Proceedings

Conference Proceedings
Kim,I.-S. ; Lee,J.-H. ; Cha,D.-H. ; Park,J.-S. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.872-881,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
5.

Conference Proceedings

Conference Proceedings
Choi,S.-J. ; Kang,Y. ; Jung,D.-W. ; Park,C.-G. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.104-112,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
6.

Conference Proceedings

Conference Proceedings
Cha,D.-H. ; Kye,J.-W. ; Seong,N.-G. ; Kang,H.-Y. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.46-54,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
7.

Conference Proceedings

Conference Proceedings
Choi,S.-J. ; Kim,H.-W. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.54-61,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
8.

Conference Proceedings

Conference Proceedings
Yoon,K.-S. ; Jung,D.-W. ; Lee,S. ; Lee,S.-H. ; Choi,S.-J. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XVIII.  4345  pp.688-694,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
9.

Conference Proceedings

Conference Proceedings
Kang,Y. ; Woo,S.-G. ; Choi,S.-J. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XVIII.  4345  pp.222-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
10.

Conference Proceedings

Conference Proceedings
Kim,I.-S. ; Kim,B.-S. ; Lee,J.-H. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.17-24,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181