1.

Conference Proceedings
Conference Proceedings
1. Adhesion Properties of PMSSQ-Based Low Dielectric Constant Films by Modified Edge Lift-Off Test
Kim, Y.D. ; Sin, D.S. ; Moon, M.S. ; Kang, J.W. ; Nam, H.Y. ; Choi, B.K. ; Kang, K.K. ; Ko, M.J.
Pub. info.: Thin film materials, processes, and reliability : proceedings of the international symposium.  pp.185-192,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-24
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Polysilsequioxane Based Low-k Dielectrics
Ko, M.J. ; Moon, M.S. ; Shin, D.S. ; Kang, J.W. ; Nain, H.T.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.165-174,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-27