1.

Conference Proceedings
Conference Proceedings
1. Improved Process Window Using Low-Carbon GexSi1-x-yCy Epitaxial Layers
Mocuta, A. ; Greve, D. W. ; Strong, R. M.
Pub. info.: III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.287-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 535
2.

Conference Proceedings
Conference Proceedings
2. (14.1) 10:05 - 10:25AM - Retardation of Arsenic Diffusion in Silicon-Germanium by co-Implantation
Dokumaci, O. ; Ronsheim, P. ; Mocuta, A. ; Mocuta, D. ; Kozlowski, P. ; Chidambarrao, D. ; Saunders, P. ; Chen, H. (IBM)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.893-902,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07