1.

Conference Proceedings
Conference Proceedings
1. Sensors Based on SiC-AIN MEMS
Doppalapudi, D. ; Mlcak, R. ; Chan, J. ; Tuller, H. L. ; Abell, J. ; Li, W. ; Moustaka, T.D.
Pub. info.: State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia.  pp.287-299,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-06
2.

Conference Proceedings
Conference Proceedings
2. Single Crystal SiC Microhotplate Conduetometrie Chemical Sensor Arrays
Mlcak, R. ; Doppalapudi, D. ; Whitfield, G. ; H. Tuller (Boston MicroSystems, Inc.)
Pub. info.: Chemical sensors VI : chemical and biological sensors and analytical methods : proceedings of the international symposium.  pp.36-42,  2004.  Pennington,NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-08
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of a High-Sensitivity Pressure Sensor with Nitride Membranes and Single Crystal Piezoresistors Using Wafer Bond Etch Back
Desmond, C.A. ; Mlcak, R. ; Franz, D.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.509-517,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7