1.

Conference Proceedings
Conference Proceedings
1. RESIDUAL STRESS MEASUREMENT IN SILICON SUBSTRATE AFTER LOCAL THERMAL OXIDATION USING MICROSCOPIC RAMAN SPECTROSCOPY
Miura, Hideo ; Sakata, Hiroshi ; Sakata, Shinji
Pub. info.: Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.345-350,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 226
2.

Conference Proceedings
Conference Proceedings
2. INITIAL EVOLUTION OF COBALT SILICIDES IN THE COBALT/AMORPHOUS-SILICON THIN FILM SYSTEM
Miura, Hideo ; Ma, En ; Thompson, Carl V.
Pub. info.: Phase transformation kinetics in thin films : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A..  pp.139-144,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 230
3.

Conference Proceedings
Conference Proceedings
3. INTERNAL STRESS CHANGE OF PHOSPHORUS-DOPED AMORPHOUS SILICON THIN FILMS DURING CRYSTALLIZATION
Miura, Hideo ; Nishimura, Asao
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.573-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
4.

Conference Proceedings
Conference Proceedings
4. Mechanical-Stress-Controlled Silicide Inter- Connections For Highly Reliable Semiconductor Devices
Shimazu, Hiromi ; Miura, Hideo
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.657-662,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
5.

Conference Proceedings
Conference Proceedings
5. Influence of Oxygen Vacancies and Strain on Electronic Reliability of SiO2-x Films.
Suzuki, Ken ; Ito, Yuta ; Miura, Hideo ; Shoji, Tetsuo
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.77-82,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864