1.

Conference Proceedings
Conference Proceedings
1. Semiconductor pattern analysis with induced polarization [5992-58]
Chen, T. ; Milster, T. ; Yang, S. H.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921L-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. Influence of OPC features on the profile of 2D mask patterns
Khoh, A. ; Milster, T. ; Choi, B.-I. ; Samudra, G.S. ; Wu, Y.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1127-1138,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. Maskless lithography with the solid immersion lens nano probes
Milster, T. ; Chen, T. ; Nam, D. ; Schlesinger, T. E.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.545-556,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567