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11 results

Conference Proceedings

1. Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology

Brown,G.C. ; Pryputniewicz,R.J. ; Boer,M.P.de ; Miller,S.L.

Pub. info.:	Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA. Part B pp.592-600, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4101

Conference Proceedings

2. Performance trade-offs for a surface micromachined microengine

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.182-191, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

Conference Proceedings

3. Optical probe for micromachine performance analysis

Dickey,F.M. ; Holswade,S.C. ; Smith,N.F. ; Miller,S.L.

Pub. info.:	Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.52-61, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3008

Conference Proceedings

4. Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

Dyck,C.W. ; Smith,J.H. ; Miller,S.L. ; Russick,E.M. ; Adkins,C.L.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.225-235, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

Conference Proceedings

5. Friction in surface-micromachined microengines

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California. pp.197-204, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2722

Technical Paper

6. Comparison of Motored and Fired Velocities in a Two Stroke Engine

Ghandhi,J.B. ; Miller,S.L.

Pub. info.:	Emissions in 2-stroke and small 4-stroke engines. pp.7-16, 1998. Society of Automotive Engineering, Inc.
Title of ser.:	SAE special publication
Ser. no.:	SP-1381

Conference Proceedings

7. Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)

Smith,J.H. ; Rodgers,M.S. ; Sniegowski,S.L. ; Miller,S.L. ; Hetherington,D.L. ; McWhorter,P.J. ; Warren,M.E.

Pub. info.:	Micromachined Devices and Components IV. pp.42-47, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

Conference Proceedings

8. Silicon nitride membranes for filtration and separation

Galambos,P. ; Zavadil,K. ; Shul,R.J. ; Willison,C.G. ; Miller,S.L.

Pub. info.:	Microfluidic Devices and Systems II. pp.273-283, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3877

Conference Proceedings

9. Microelectromechanical high-density energy storage/rapid release system

Rodgers,M.S. ; AIlen,J.J. ; Meeks,K.D. ; Jensen,B.D. ; Miller,S.L.

Pub. info.:	Micromachined Devices and Components V. pp.212-222, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3876

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Conference Proceedings

10. Routes to failure in rotating MEMS devices experiencing sliding friction

Miller,S.L. ; LaVigne,C. ; Rodgers,M.S. ; Sniegowski,J.J. ; Waters,J.P. ; McWhorter,P.J.

Pub. info.:	Micromachined Devices and Components III. pp.24-30, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

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